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SiVal M Plan Apo Series
SiVal Instruments
Products > Objectives > SiVal M Plan Apo Series >

The SiVal’s infinite M Plan Apo series objectives are one of the best class objectives in the world. With super long working distance, high resolution, high NA, full plan field, and infinite bright view field, this series are ideally applied to metallographic test, semiconductor and telecommunication inspection, like LCD, TFT, PDP matrix inspection.

The most high end and premium quality objectives for metallographic test and semiconductor inspection

  • High resolution
  • High NA
  • Super long working distance
  • Infinite bright view field
  • Full plan field
  • Wide spectral range
  • Standard mount
Products Specifications
Parameters Model
M Plan Apo f=200/ 95mm
  2x 5x 5x 10x 20x 20x 50x 50x 100x
Numerical Aperture, N.A 0.055 0.13 0.14 0.28 0.30 0.42 0.50 0.55 0.55
Focal Length , f′(mm) 100 40 40 20 10 10 4 4 2
Resolving Power, R(um) 5 2.3 2.2 1 1 0.7 0.6 0.5 0.5
Depth of Focus, ±Δp(um) 91 15 14 3.5 3.5 1.6 1.1 0.9 0.9
Working Dist., W.D.(mm) 34 44 34 34 30 20 17 13 13

 

F.N
Eyepiece, Φ24 (mm) 12 4.8 4.8 2.4 1.2 1.2 0.48 0.48 0.24
2/3″CCD V×H(mm) 4.4×3.3 1.76×1.32 1.76×1.32 0.88×0.66 0.44×0.33 0.44×0.33 0.176×0.132 0.176×0.132 0.088×0.066
1/2″CCD V×H(mm) 3.2×2.4 1.28×0.96 1.28×0.96 0.64×0.48 0.32×0.24 0.32×0.24 0.128×0.096 0.128×0.096 0.064×0.048

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